2 Beyond Supply and Exhaust: What Else Should We be Concerned with in Semi-Conductor Facilities?

Michael Connor, P.E., WSP
ASHRAE members are typically concerned with supply and exhaust systems in Semi-conductor facilities. However there are many other areas that can affect the performance of HVAC equipment. Should a Handbook Chapter dedicated specifically to Semi-conductor and Nano-technology facilities be created to address these concerns beyond clean room design and industrial gas cleaning?

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