Workshop 5 What Should Be in a New Applications Handbook Chapter Covering Semi-Conductor and Nano-Technology Facilities

Sunday, January 29, 2017: 8:00 AM-9:00 AM
Fundamentals and Applications
Chair: Michael Connor, P.E., WSP
Technical Committee: 9.2 Industrial Air Conditioning
CoSponsor: 9.11 Clean Spaces
Currently the ASHRAE Handbook, Applications volume contains chapters that affect the design of components of semi-conductor and nano-technology facilities. There is no chapter currently that pulls all of it together. What is lacking in the other chapters that can be addressed in a high level chapter discussing these facilities?

1  Safety Aspects of Semi-Conductor Facilities

Deep Ghosh, Southern Co.
ASHRAE members are being asked in the design of systems to consider the safety aspects of systems. Semi-conductor and Nano-technology facilities are among some of the most dangerous facilities that ASHRAE membership may encounter. Should a new chapter be developed for these facilities and should the methodology for assessing risk and developing mitigating factors be a significant portion of that chapter?

2  Beyond Supply and Exhaust: What Else Should We be Concerned with in Semi-Conductor Facilities?

Michael Connor, P.E., WSP
ASHRAE members are typically concerned with supply and exhaust systems in Semi-conductor facilities. However there are many other areas that can affect the performance of HVAC equipment. Should a Handbook Chapter dedicated specifically to Semi-conductor and Nano-technology facilities be created to address these concerns beyond clean room design and industrial gas cleaning?
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