3 ACR Philosophy and Practice: Cleanrooms

Philip Naughton, Applied Materials Inc
Cleanrooms typically rely upon air change rates to help maintain a given cleanliness class. Air change rates can vary between 2 ACH to well over 500 ACH. There is much anecdotal data supporting a correlation between cleanroom cleanliness and the air change rates with little empirical data. Many cleanroom owners are compelled by regulating authorities to maintain high air change rates. This presentation reviews the current regulatory guidance for cleanroom air change rates as well as present data on cleanrooms that have been able to reduce their air change rates and still maintain their required cleanliness.

Register now!